A novel doping technology for ultra-shallow junction fabrication: boron diffusion from boron-adsorbed layer by rapid thermal annealing

Author: Kim K.-S.   Song Y.-H.   Park K.-T.   Kurino H.   Matsuura T.   Hane K.   Koyanagi M.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.369, Iss.1, 2000-07, pp. : 207-212

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