CH2Cl2 thin film formation on low-pressure DC plasma discharge

Author: Martinez H.   Flores O.   Campillo B.   Gomez A.   Salazar-Flores L.   Poveda J. C.  

Publisher: Taylor & Francis Ltd

ISSN: 1042-0150

Source: Radiation Effects and Defects in Solids, Vol.167, Iss.8, 2012-08, pp. : 583-593

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Abstract