Using tetrakis-diethylamido-hafnium for HfO 2 thin-film growth in low-pressure chemical vapor deposition

Author: Ohshita Y.   Ogura A.   Hoshino A.   Hiiro S.   Suzuki T.   Machida H.  

Publisher: Elsevier

ISSN: 0040-6090

Source: Thin Solid Films, Vol.406, Iss.1, 2002-03, pp. : 215-218

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Abstract