Analysis of Fringe Effect of MEMS Comb Capacitor with Slot Structures

Author: Dong Linxi   Huo Weihong   Yan Haixia   Sun Lingling  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.129, Iss.1, 2011-01, pp. : 122-132

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Abstract