Characteristics of ZrO2 Thin Films by Atomic Layer Deposition for Alternative Gate Dielectric Applications

Author: Park Juwhan   Choi Bongsik   Park Nohhon   Shin Hyun-Jung   Lee Jae-Gab   Kim Jiyoung  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 23-32

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Abstract