Hafnium Nitrate Precursor Synthesis and HfO2 Thin Film Deposition

Author: Zhuang Weiwei   Conley John F.   Ono Yoshi   Evans David R.   Solanki R.  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.48, Iss.1, 2002-01, pp. : 3-12

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract