EFFECT OF NITROGEN INCORPORATION ON ELECTRICAL PROPERTIES OF HIGH- K NANOMIXED Hf x Al y O z FILM CAPACITORS GROWN ON RU METAL ELECTRODES BY ATOMIC LAYER DEPOSITION

Author: SEONG NAK-JIN   YOON SOON-GIL   YEOM SEUNG-JIN   WOO HYUN-KYUNG   KIL DEOK-SIN   ROH JAE-SUNG   SOHN HYUN-CHUL  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.74, Iss.1, 2005-09, pp. : 131-136

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