FORMATION OF Si NANOSTRUCTURES USING DRY ETCHING WITH SELF-ORGANIZED METAL OXIDE NANOPILLAR MASKS

Author: PARK IK   LEE JANG   CHUNG CHEE  

Publisher: Taylor & Francis Ltd

ISSN: 1058-4587

Source: Integrated Ferroelectrics, Vol.78, Iss.1, 2006-11, pp. : 245-253

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Abstract