Patterning of titanium oxide nanostructures by electron-beam lithography combined with plasma etching

Author： Hotovy I Kostic I Nemec P Predanocy M Rehacek V

E-ISSN： 1361-6439|25|7|74006-74012

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.25, Iss.7, 2015-07, pp. : 74006-74012

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