PRE-ANNEALING EFFECTS ON AL METALLIZATION PROPERTIES IN HIGH DENSITY FeRAM DEVICE

Author： CHO K. CHOI J. YU H. KWEON S. YEOM S. KIM N. CHOI E. SUN H. HONG S. HONG T. KIM I. LEE J. UR S. LEE Y. RYU S. CHOI S.

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.81, Iss.1, 2006-11, pp. : 113-122

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