Near-interfacial thermal donor generation during processing of (100)Si/low-κ Si-oxycarbide insulator structures revealed by electron spin resonance

Author： Stesmans A   Iacovo S   Nguyen S   Afanas’ev V V   Baklanov M R   Urbanowicz A M  

Publisher： IOP Publishing

ISSN： 0268-1242

Source： Semiconductor Science and Technology, Vol.29, Iss.9, 2014-09, pp. : 95008-95016

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