Modification and reduction of defects in thin gate dielectric of MIS devices by injection‐thermal and irradiation treatments

Publisher： John Wiley & Sons Inc

E-ISSN： 1610-1642|12|1‐2|126-130

ISSN： 1862-6351

Source： PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.12, Iss.1‐2, 2015-01, pp. : 126-130

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