Modeling of the nanoparticle coagulation in pulsed radio-frequency capacitively coupled C₂H₂ discharges

E-ISSN： 1741-4199|24|7|75204-75209

ISSN： 1674-1056

Source： Chinese Physics B, Vol.24, Iss.7, 2015-07, pp. : 75204-75209

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