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IOP Publishing

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Fabrication of Ni stamp with high aspect ratio, two-leveled, cylindrical microstructures using dry etching and electroplating

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Fabrication and characterization of laterally-driven piezoelectric bimorph MEMS actuator with sol-gel-based high-aspect-ratio PZT structure

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Journal of Micromechanics and Microengineering, Vol. 23, Iss. 6, 2013-06 ,pp. : 65014-65024

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Fabrication of High-Aspect-Ratio 3D Hydrogel Microstructures Using Optically Induced Electrokinetics

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Micromachines, Vol. 7, Iss. 4, 2016-04 ,pp. : 65-65

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Fabrication of a Polymer High-Aspect-Ratio Pillar Array Using UV Imprinting

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