Stress relaxation in dual ion beam sputtered Nb2O5 and SiO2 thin films: application in a Fabry–Pérot filter array with 3D nanoimprinted cavities

Author: Ullah Anayat   Wilke Hans   Memon Imran   Shen Yannan   Woidt Carsten   Hillmer Hartmut   Ullah Anayat  

Publisher: IOP Publishing

E-ISSN: 1361-6439|25|5|55019-55026

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55019-55026

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