Author： GelinckGerwin H CobbBrian van BreemenAlbert J J M MynyKris
Publisher： IOP Publishing
E-ISSN： 1361-6641|30|7|74003-74009
ISSN： 0268-1242
Source： Semiconductor Science and Technology, Vol.30, Iss.7, 2015-07, pp. : 74003-74009
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