Atomic redistribution of implanted Fe and associated defects around moving SiO2/Si interfaces

E-ISSN： 1610-1642|12|8|1166-1169

ISSN： 1862-6351

Source： PHYSICA STATUS SOLIDI (C) - CURRENT TOPICS IN SOLID STATE PHYSICS, Vol.12, Iss.8, 2015-08, pp. : 1166-1169

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