Hot‐wire assisted ALD of tungsten films: In‐situ study of the interplay between CVD, etching, and ALD modes

E-ISSN： 1862-6319|212|7|1607-1614

ISSN： 1862-6300

Source： PHYSICA STATUS SOLIDI (A) APPLICATIONS AND MATERIALS SCIENCE, Vol.212, Iss.7, 2015-07, pp. : 1607-1614

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