Author: Frankiewicz Christophe Zoueshtiagh Farzam Talbi Abdelkrim Streque Jérémy Pernod Philippe Merlen Alain
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.11, 2014-11, pp. : 115008-115016
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