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IOP Publishing

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Faster and exact implementation of the continuous cellular automaton for anisotropic etching simulations

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A novel particle swarm optimization based robust H-infinity control for rotorcrafts

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Online monitoring of the passivation breakthrough during deep reactive ion etching of silicon using optical plasma emission spectroscopy

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Journal of Micromechanics and Microengineering, Vol. 23, Iss. 7, 2013-07 ,pp. : 74001-74006

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Deep reactive ion etching of silicon moulds for the fabrication of diamond x-ray focusing lenses

By Malik A M   Fox O J L   Alianelli L   Korsunsky A M   Stevens R   Loader I M   Wilson M C   Pape I   Sawhney K J S   May P W  

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