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Author: Li Yuan Gosálvez Miguel A Pal Prem Sato Kazuo Xing Yan
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|5|55023-55035
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.5, 2015-05, pp. : 55023-55035
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