Depth distribution of point defects in Si bombarded by high-energy N5+ and Si5+ ions

Author: Dvurechenskii A.   Karanovich A.   Grötzschel R.   Herrmann F.   Kegler R.   Rybin A.  

Publisher: MAIK Nauka/Interperiodica

ISSN: 1063-7834

Source: Physics of the Solid State, Vol.40, Iss.2, 1998-02, pp. : 195-199

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