The effects of oxygen plasma and humidity on surface roughness, water contact angle and hardness of silicon, silicon dioxide and glass

Author： Alam A U Howlader M M R Deen M J

Publisher： IOP Publishing

ISSN： 0960-1317

Source： Journal of Micromechanics and Microengineering, Vol.24, Iss.3, 2014-03, pp. : 35010-35023

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