Author: Takahashi Hidetoshi Thanh-Vinh Nguyen Jung Uijin G Matsumoto Kiyoshi Shimoyama Isao
Publisher: IOP Publishing
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65014-65022
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