Design of MEMS based three-axis motion stage by incorporating a nested structure

Author: Kim Y-S   Dagalakis N G   Gupta S K  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.7, 2014-07, pp. : 75009-75019

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