Fabrication of nanoelectromechanical systems via the integration of high surface area glancing angle deposition thin films

Author: Westwood J N   Sauer V T K   Kwan J K   Hiebert W K   Sit J C  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65021-65031

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