A laterally-driven micromachined inertial switch with a compliant cantilever beam as the stationary electrode for prolonging contact time

Author: Chen Wenguo   Wang Yan   Wang Yongliang   Zhu Bin   Ding Guifu   Wang Hong   Zhao Xiaolin   Yang Zhuoqing  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.24, Iss.6, 2014-06, pp. : 65020-65029

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