A three-axis high-resolution capacitive tactile imager system based on floating comb electrodes

Author: Surapaneni R.   Guo Q.   Xie Y.   Young D.J.   Mastrangelo C.H.  

Publisher: IOP Publishing

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.23, Iss.7, 2013-07, pp. : 75004-75015

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