Electron heating and control of ion properties in capacitive discharges driven by customized voltage waveforms

Author： Derzsi A   Korolov I   Schüngel E   Donkó Z   Schulze J  

Publisher： IOP Publishing

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.22, Iss.6, 2013-12, pp. : 65009-65021

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