Occurrence and elimination of in-plane misoriented crystals in AlN epilayers on sapphire via pre-treatment control

Author: Hu Wang   Hui Xiong   Zhi-Hao Wu   Chen-Hui Yu   Yu Tian   Jiang-Nan Dai   Yan-Yan Fang   Jian-Bao Zhang   Chang-Qing Chen  

Publisher: IOP Publishing

ISSN: 1674-1056

Source: Chinese Physics B, Vol.23, Iss.2, 2014-02, pp. : 28101-28105

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