The STI stress effect on deep submicron PDSOI MOSFETs

Author: Jianhui Bu   Shuzhen Li   Jiajun Luo   Zhengsheng Han  

Publisher: IOP Publishing

ISSN: 1674-4926

Source: Journal of Semiconductors, Vol.35, Iss.3, 2014-03, pp. : 34008-34010

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