Microgalvanic nickel pulse plating process for the fabrication of thermal microactuators

Author： Hansal Wolfgang   Steiner Harald   Mann R.   Halmdienst M.   Schalko J.   Keplinger F.   Svasek P.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.20, Iss.4-5, 2014-04, pp. : 681-689

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