Ultra thin gate oxide characterization

Author： Roy D.   Bruyere S.   Rideau D.   Gilibert F.   Giguerre L.   Monsieur F.   Gouget G.   Scheer P.  

Publisher： Edp Sciences

E-ISSN： 1286-0050|27|1-3|21-27

ISSN： 1286-0042

Source： EPJ Applied Physics (The), Vol.27, Iss.1-3, 2010-03, pp. : 21-27

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