Corrigendum: Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (2015 Plasma Sources Sci. Technol. 24 054002)

Publisher: IOP Publishing

E-ISSN: 1361-6595|24|6|69501-69501

ISSN: 0963-0252

Source: Plasma Sources Science and Technology, Vol.24, Iss.6, 2015-12, pp. : 69501-69501

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Abstract