Corrigendum: Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma (2015 Plasma Sources Sci. Technol. 24 054002)
Publisher: IOP Publishing
E-ISSN: 1361-6595|24|6|69501-69501
ISSN: 0963-0252
Source: Plasma Sources Science and Technology, Vol.24, Iss.6, 2015-12, pp. : 69501-69501
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Abstract