Studies on the effect of finite geometrical asymmetry in dual capacitively coupled radio frequency plasma

Author： Bora B  

Publisher： IOP Publishing

E-ISSN： 1361-6595|24|5|54002-54009

ISSN： 0963-0252

Source： Plasma Sources Science and Technology, Vol.24, Iss.5, 2015-10, pp. : 54002-54009

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