Improving picogram mass sensitivity via frequency doubling in coupled silicon micro-cantilevers

Author: Wang Dong F   Du Xu   Wang Xin   Ikehara Tsuyoshi   Maeda Ryutaro  

Publisher: IOP Publishing

E-ISSN: 1361-6439|26|1|15006-15012

ISSN: 0960-1317

Source: Journal of Micromechanics and Microengineering, Vol.26, Iss.1, 2016-01, pp. : 15006-15012

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