![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
Engineering stress in thin films for the field of bistable MEMS
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|12|125025-125031
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.12, 2015-12, pp. : 125025-125031
Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.
Abstract
Related content
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)
![](/images/ico/ico_close.png)
![](/images/ico/ico5.png)