Micro gas bearings fabricated by deep X-ray lithography

Author： Kim D.   Lee S.   Jin Y.   Desta Y.   Bryant M. D.   Goettert J.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.6-7, 2004-10, pp. : 456-461

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