A Si stencil mask for deep X-ray lithography fabricated by MEMS technology

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Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1335-1342

Springer Publishing Company

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Micro gas bearings fabricated by deep X-ray lithography

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Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating

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Fluid filter fabricated by deep X-ray lithography for micro fluidics

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Fabrication method of two-level polymeric microstructure with the help of deep X-ray lithography

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Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1739-1744

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