A Micro corona motor fabricated by a SU-8 built-on X-ray mask

Author： Lee S.   Kim D.   Jin Y.   Han Y.   Desta Y.   Bryant M. D.   Goettert J.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.10, Iss.6-7, 2004-10, pp. : 522-526

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