Yield analysis via induction of process statistics into the design of MEMS and other microsystems

Author： Vudathu Shyam   Duganapalli Kishore   Laur Rainer   Kubalińska Dorota   Bunse-Gerstner Angelika  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.11-12, 2007-07, pp. : 1545-1551

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