Fabrication of high aspect ratio nano gratings using SR lithography

Author： Kato Fumiki   Fujinawa Shinya   Li Yigui   Sugiyama Susumu  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 221-225

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