Soft X-ray lithography of high aspect ratio SU8 submicron structures

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Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1683-1688

Springer Publishing Company

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Deep sub micron high aspect ratio polymer structures produced by hard X-ray lithography

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Submicron-scale surface acoustic wave resonators fabricated by high aspect ratio X-ray lithography and aluminum lift-off

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Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1715-1719

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Fabrication of high aspect ratio nano gratings using SR lithography

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Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 221-225

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Fabrication of RF MEMS variable capacitors by deep X-ray lithography and electroplating

By Achenbach Sven   Klymyshyn David   Haluzan Darcy   Mappes Timo   Wells Garth   Mohr Jürgen  

Microsystem Technologies, Vol. 13, Iss. 3-4, 2007-02 ,pp. : 343-347

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