SU-8 3D microoptic components fabricated by inclined UV lithography in water

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 245-251

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Fabrication of comb-drive micro-actuators based on UV lithography of SU-8 and electroless plating technique

By Dai Wen

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1745-1750

Springer Publishing Company

Access to resources Recommend Favorite

High throughput projection UV lithography of high-aspect-ratio thick SU-8 microstructures

By Yang Ren

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1233-1243

Springer Publishing Company

Access to resources Recommend Favorite

Fabrication of micro sloping structures of SU-8 by substrate penetration lithography

By Onishi J.

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1305-1310

Springer Publishing Company

Access to resources Recommend Favorite

A Micro corona motor fabricated by a SU-8 built-on X-ray mask

By Lee S. Kim D. Jin Y. Han Y. Desta Y. Bryant M. D. Goettert J.

Microsystem Technologies, Vol. 10, Iss. 6-7, 2004-10 ,pp. : 522-526

Springer Publishing Company

Access to resources Recommend Favorite

Soft X-ray lithography of high aspect ratio SU8 submicron structures

By Reznikova Elena

Microsystem Technologies, Vol. 14, Iss. 9-11, 2008-10 ,pp. : 1683-1688

Springer Publishing Company

Access to resources Recommend Favorite