Author： Engelke Rainer Ahrens Gisela Arndt-Staufenbiehl Norbert Kopetz Stefan Wiesauer Karin Löchel Bernd Schröder Henning Kastner Johann Neyer Andreas Stifter David Grützner Gabi
Publisher： Springer Publishing Company
ISSN： 0946-7076
Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 319-325
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