SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts

Author： Kouba J.   Engelke R.   Bednarzik M.   Ahrens G.   Scheunemann Heinz-Ulrich   Gruetzner G.   Loechel B.   Miller H.   Haase D.  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 311-317

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