A hybrid approach for fabrication of polymeric BIOMEMS devices

Author： Singh Varshni   Desta Yohannes   Datta Proyag   Guy Jason   Clarke Mark   Feedback Daniel   Weimert J.   Goettert Jost  

Publisher： Springer Publishing Company

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 369-377

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