Large area micro hot embossing of Pyrex glass with GC mold machined by dicing

Author： Takahashi Masaharu Murakoshi Yoichi Maeda Ryutaro Hasegawa Kohei

ISSN： 0946-7076

Source： Microsystem Technologies, Vol.13, Iss.3-4, 2007-02, pp. : 379-384

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