Simultaneous Formation of Non-coplanar Resonant Beams and Supporting Beams of Bulk Micromachining Resonant Accelerometers by Maskless Anisotropic Wet Etching

Author： Han Jianqiang   Li Senlin   Li Yan   Feng Risheng   Yan Tianhong  

Publisher： Taylor & Francis Ltd

ISSN： 1058-4587

Source： Integrated Ferroelectrics, Vol.151, Iss.1, 2014-02, pp. : 133-147

Disclaimer: Any content in publications that violate the sovereignty, the constitution or regulations of the PRC is not accepted or approved by CNPIEC.

Previous Menu Next

Related content

Bulk vertical micromachining of single-crystal sapphire using inductively coupled plasma etching for x-ray resonant cavities

By  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 1, 2015-01 ,pp. : 15016-15024

IOP Publishing

Access to resources Recommend Favorite

Experimental and analytical study of highly tunable electrostatically actuated resonant beams

By  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 12, 2015-12 ,pp. : 125015-125024

IOP Publishing

Access to resources Recommend Favorite

Level set implementation for the simulation of anisotropic etching: application to complex MEMS micromachining

By Montoliu C   Ferrando N   Gosálvez M A   Cerdá J   Colom R J  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 7, 2013-07 ,pp. : 75017-75026

IOP Publishing

Access to resources Recommend Favorite

Non-Lithographic Silicon Micromachining Using Inkjet and Chemical Etching

By Hoshian Sasha   Gaspar Cristina   Vasara Teemu   Jahangiri Farzin   Jokinen Ville   Franssila Sami  

Micromachines, Vol. 7, Iss. 12, 2016-12 ,pp. : 222-222

MDPI

Access to resources Recommend Favorite

Characterisation and comparison of microfluidic chips formed using abrasive jet micromachining and wet etching

By Ghobeity Amin   Crabtree H John   Papini Marcello   Spelt Jan K  

Journal of Micromechanics and Microengineering, Vol. 22, Iss. 2, 2012-02 ,pp. : 25014-25023

IOP Publishing

Access to resources Recommend Favorite