Researching the Aluminum Nitride Etching Process for Application in MEMS Resonators

By Yang Jian   Si Chaowei   Han Guowei   Zhang Meng   Ma Liuhong   Zhao Yongmei   Ning Jin  

Micromachines, Vol. 6, Iss. 2, 2015-02 ,pp. : 281-290

MDPI

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Local residual stress monitoring of aluminum nitride MEMS using UV micro-Raman spectroscopy

By Choi Sukwon   Griffin Benjamin A  

Journal of Micromechanics and Microengineering, Vol. 26, Iss. 2, 2016-02 ,pp. : 25009-25012

IOP Publishing

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Influence of aluminum nitride crystal orientation on MEMS energy harvesting device performance

By Jackson Nathan   O’Keeffe Rosemary   Waldron Finbarr   O’Neill Mike   Mathewson Alan  

Journal of Micromechanics and Microengineering, Vol. 23, Iss. 7, 2013-07 ,pp. : 75014-75022

IOP Publishing

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Temperature dependent performance of piezoelectric MEMS resonators for viscosity and density determination of liquids

By Pfusterschmied G   Kucera M   Wistrela E   Manzaneque T   Ruiz-Díez V   Sánchez-Rojas J L   Bittner A   Schmid U  

Journal of Micromechanics and Microengineering, Vol. 25, Iss. 10, 2015-10 ,pp. : 105014-105021

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Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films

By Hees J   Heidrich N   Pletschen W   Sah R E   Wolfer M   Williams O A   Lebedev V   Nebel C E   Ambacher O  

Nanotechnology, Vol. 24, Iss. 2, 2013-01 ,pp. : 25601-25607

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