Author: Duan Ani Luu Thi-Thuy Wang Kaiying Aasmundtveit Knut Hoivik Nils
Publisher: IOP Publishing
E-ISSN: 1361-6439|25|9|97001-97005
ISSN: 0960-1317
Source: Journal of Micromechanics and Microengineering, Vol.25, Iss.9, 2015-09, pp. : 97001-97005
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Abstract